2

Numerical Study of HBr/He Discharges in Capacitive Coupled Plasma Reactor

Année:
2016
Langue:
english
Fichier:
PDF, 1.02 MB
english, 2016
3

Fluid Simulation of Capacitively Coupled HBr/Ar Plasma for Etching Applications

Année:
2016
Langue:
english
Fichier:
PDF, 1.06 MB
english, 2016