A numerical study of the effect of various reactions, pressure and gas mixture ratio on the density distribution of etchant species (H, Br, Br + , and HBr + ) in HBr/He plasma
Gul, Banat, Aman-ur-Rehman,Volume:
23
Langue:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4945757
Date:
April, 2016
Fichier:
PDF, 1.40 MB
english, 2016