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Atomic Layer Deposition of Hafnium Dioxide Films Using Hafnium Bis(2-butanolate)bis(1-methoxy-2-methyl-2-propanolate) and Water
K. Kukli, M. Ritala, M. Leskelä, T. Sajavaara, J. Keinonen, A.C. Jones, J.L. RobertsVolume:
9
Année:
2003
Langue:
english
Pages:
6
DOI:
10.1002/cvde.200306263
Fichier:
PDF, 298 KB
english, 2003