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Volume 241; Issue 1-2

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Thin Solid Films
Volume 241; Issue 1-2

Thin Solid Films

Volume 241; Issue 1-2

1

Editorial Board

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 44 KB

english, 1994

2

Preface

H. Freller, J.M. Martínez-Duart, Y. Pauleau, J. Dieleman

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 110 KB

english, 1994

3

Epitaxial growth, structure and properties of Ni films grown on MgO(100) by d.c. bias sputter deposition

H. Qiu, A. Kosuge, H. Maruyama, M. Adamik, G. Safran, P.B. Barna, M. Hashimoto

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 322 KB

english, 1994

4

Highly pressurized Kr agglomerates in sputtered Si films

M.J.W. Greuter, L. Niesen, A. van Veen, M. Verwerft, J.Th.M. de Hosson

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 347 KB

english, 1994

5

Alumina coating on polyethylene terephthalate

F. Bodino, G. Baud, M. Benmalek, J.P. Besse, H.M. Dunlop, M. Jacquet

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 279 KB

english, 1994

6

Silicate glass films deposited by reactive r.f. magnetron sputtering: electrical characterization

G. Della Mea, V. Rigato, P. Colombo, R. Dal Maschio, C. Sighel, S. Zandolin, P.K. Mwose

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 421 KB

english, 1994

7

Spectroscopic ellipsometry studies of indium tin oxide and other flat panel display multilayer materials

John A. Woollam, W.A. McGaham, B. Johs

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 234 KB

english, 1994

8

Electrical characterization of laser-induced deposits of aluminium on gallium arsenide

D. Tonneau, M. Cuniot, J.M. Laroche, H. Orain, J.F. Rommeluere, J.E. Bouree

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 410 KB

english, 1994

9

Investigation of the microstructure, chemical composition and lateral growth kinetics of TiN films deposited by laser-induced chemical vapour deposition

A.J. Silvestre, M.L.G.F. Paramês, O. Conde

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 349 KB

english, 1994

10

Dependence of deposition kinetics on precursor concentration and writing speed in pyrolytic laser deposition from solution

Zs. Geretovsky, T. Szörényi, K. Bali, A. Tóth

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 361 KB

english, 1994

11

Laser-assisted nickel deposition onto synthetic diamonds

V.A. Laptev, S.M. Pimenov, G.A. Shafeev

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 348 KB

english, 1994

12

Tailoring silicon oxide film properties by tuning the laser beam-to-substrate distance in ArF laser-induced chemical vapor deposition

T. Szörényi, P. González, E. Garcá, J. Pou, D. Fernández, J. Serra, B. León, M. Pérez-Amor

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 312 KB

english, 1994

13

Raman analysis of the modifications induced by laser processing and hydrogen implantation in carbon films deposited by the ablation technique

F. Antoni, B. Prévot, E. Fogarassy, S. de Unamuno

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 310 KB

english, 1994

14

Real time emission spectroscopy during laser ablation of BiSrCaCuO targets

J. Gonzalo, F. Vega, C.N. Afonso

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 311 KB

english, 1994

15

Deposition of YBa2Cu3O7−x thin films by channel-spark pulsed electron beam ablation

Q.D. Jiang, F.C. Matacotta, M.C. Konijnenberg, G. Müller, C. Schultheiss

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 241 KB

english, 1994

16

Ablation dynamics of silicon based targets in oxygen and nitrogen atmospheres

W. Marine, V. Tokarev, M. Gerri, M. Sentis, E. Fogarassy

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 520 KB

english, 1994

17

Peculiarities of laser melting and evaporation of superconducting ceramics

V. Mazhukin, I. Smurov, G. Flamant, C. Dupuy

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 423 KB

english, 1994

18

Structural characterization and properties of superconducting thin films produced by pulsed laser deposition

A. Giardini-Guidoni, D. Ferro, U. Gambardella, V. Marotta, R. Martino, A. Morone, S. Orlando

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 400 KB

english, 1994

19

Properties of laser pulse deposited oxide films

G. Reiße, B. Keiper, S. Weißmantel, H. Johansen, R. Scholz, T. Martini

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 654 KB

english, 1994

20

Laser induced ablation and epitaxial growth of SnSe

R. Teghil, A. Giardini-Guidoni, A. Mele, S. Piccirillo, G. Pizzella, V. Marotta

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 318 KB

english, 1994

21

Time-resolved measurements of plume shielding during ArF laser ablation of silicon

V. Tokarev, W. Marine, J.G. Lunney, M. Sentis

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 417 KB

english, 1994

22

A new method for the reduction of droplet deposition onto laser deposited thin metal films

E. van de Riet, U.K.P. Biermann, J. Dieleman

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 395 KB

english, 1994

23

SiC films prepared by pulsed excimer laser deposition

T. Zehnder, A. Blatter, A. Bächli

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 322 KB

english, 1994

24

Segregation of impurities and defects in Hg0.8Cd0.2Te by laser annealing

R. Ciach, M. Faryna, M. Kuźma, M. Pociask, E. Sheregii

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 371 KB

english, 1994

25

Preparation of Si1−xGex thin crystalline films by pulsed excimer laser annealing of heavily Ge implanted Si

F. Repplinger, E. Fogarassy, A. Grob, J.J. Grob, D. Muller, B. Prévot, J.P. Stoquert, S. De Unamuno

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 374 KB

english, 1994

26

Advanced scientific semiconductor processing based on high-precision controlled low-energy ion bombardment

Tadahiro Ohmi, Tadashi Shibata

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 744 KB

english, 1994

27

Modelling of layer-by-layer sputtering of Si(111) surfaces under irradiation with low-energy ions

V.A. Zinovyev, L.N. Aleksandrov, A.V. Dvurechenskii, K.-H. Heinig, D. Stock

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 387 KB

english, 1994

28

XAS and XRD structural studies of titanium oxide thin films prepared by ion beam induced CVD

D. Leinen, A. Fernández, J.P. Espinós, A. Caballero, A. Justo, A.R. González-Elipe

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 338 KB

english, 1994

29

Ion plating: optimum surface performance and material conservation

Nadir A.G. Ahmed

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 910 KB

english, 1994

30

Ion-beam mixing with chemical guidance part III: phase formation as a kinetic rather than thermodynamic phenomenon

Antonio Miotello, Roger Kelly

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 528 KB

english, 1994

31

Optical properties of ion-assisted deposited SiO thin films

A.J. de Castro, F. López, J. Meléndez, M. Fernández

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 277 KB

english, 1994

32

Voids in epitaxial silicon films grown under different thermal conditions: void detection by thermal helium desorption

A. van Veen, A.H. Reader, D.J. Gravesteijn, A.A. van Gorkum

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 433 KB

english, 1994

33

Effect of ion bombardment on CrSiO layers: an X-ray photoelectron spectroscopic study

I. Bertóti, A. Tóth, M. Mohai, R. Kelly, G. Marletta

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 527 KB

english, 1994

34

Comparative investigation by laser profilometry, scanning electron microscopy and atomic force microscopy of wear on solar-beam-irradiated partially oxidized TiN coatings

B.C. Oberländer, M. Franck, P. Campbell, J.P. Celis, J. Roos, L. Hellemans, J. Snauwaert

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 930 KB

english, 1994

35

Microhardness and spectroscopy studies of surface modification of titanium alloys by melted metaphosphates

M. Deffontaines-Fourez, B. Deffontaines, D. Chicot, A. Iost

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 317 KB

english, 1994

36

Chemical vapor deposition in high-density low-pressure plasmas: reactor scale-up and performance

J. Pelletier, T. Lagarde

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 688 KB

english, 1994

37

Electron cyclotron resonance plasma deposition of SiNx for optical applications

Pavel V. Bulkin, Pieter L. Swart, Beatrys M. Lacquet

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 281 KB

english, 1994

38

Millitorr range PECVD of a-SiO2 films using TEOS and oxygen

F. Templier, L. Vallier, R. Madar, J.-C. Oberlin, R.A.B. Devine

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 330 KB

english, 1994

39

Raman spectroscopy on nitrogen-incorporated amorphous hydrogenated carbon films

G. Mariotto, F.L. Freire Jr., C.A. Achete

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 349 KB

english, 1994

40

In situ monitoring by soft X-ray spectrometry of amorphous carbon plasma deposition

P.B. Legrand, J.P. Dauchot, M. Hecq

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 327 KB

english, 1994

41

Amorphous hydrogenated carbon films elaborated by plasma-assisted chemical vapour deposition: characterization of composition by nuclear methods

L. Deshayes, M. Charbonnier, M. Romand, T. Petit, N. Chevarier, A. Chevarier

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 400 KB

english, 1994

42

Plasma processes in methane discharges during r.f. plasma-assisted chemical vapour deposition of a-C:H thin films

E.H.A. Dekempeneer, J. Smeets, J. Meneve, L. Eersels, R. Jacobs

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 366 KB

english, 1994

43

Optimization of a-Si1−xCx: H films prepared by ultrahigh vacuum plasma enhanced chemical vapour deposition for electroluminescent devices

F. Demichelis, G. Crovini, C.F. Pirri, E. Tresso, G. Amato, U. Coscia, G. Ambrosone, P. Rava

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 376 KB

english, 1994

44

Thin film deposition of conductive tin oxide from tetramethyltin in a low pressure glow discharge diode reactor

Y. Farber, F. Khonsari-Arefi, J. Amouroux

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 430 KB

english, 1994

45

Plasma-enhanced chemical vapour deposition of amorphous silicon nitride for thin film diode active matrix liquid crystal displays

G. Oversluizen, W.H.M. Lodders, I.D. French

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 306 KB

english, 1994

46

Correlations between process parameters, chemical structure and electronic properties of amorphous hydrogenated GexC1−x films prepared by plasma-enhanced chemical vapour deposition in a three-electrode reactor

J. Tyczkowski, P. Kazimierski, H. Szymanowski

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 342 KB

english, 1994

47

Surface fluorination of polyethylene films by different CF4 glow discharges: effects of frequency and electrode configuration

Y. Khairallah, F. Arefi, J. Amouroux

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 495 KB

english, 1994

48

Preparation of low resistivity tungsten thin films deposited by microwave-plasma-enhanced chemical vapour deposition from the tungsten hexafluoride-hydrogen system

A. Belkacem, Y. Arnal, J. Pelletier, E. André, J.C. Oberlin

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 311 KB

english, 1994

49

The surface chemistry and kinetics of tungsten chemical vapor deposition and selectivity loss

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 796 KB

english, 1994

50

Low temperature selective growth of epitaxial Si and Si1−xGex layers from SiH4 and GeH4 in an ultrahigh vacuum, very low pressure chemical vapour deposition reactor: kinetics and possibilities

M. Caymax, J. Poortmans, A. Van Ammel, M. Libezny, J. Nijs, R. Mertens

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 449 KB

english, 1994

51

Growth of iridium films by metal organic chemical vapour deposition

Tobias Gerfin, Werner J. Hälg, Fachri Atamny, Klaus-Hermann Dahmen

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 305 KB

english, 1994

52

Chemical vapour deposition of hafnium carbide and characterization of the deposited layers by secondary-neutral mass spectrometry

H.F. Ache, J. Goschnick, M. Sommer, G. Emig, G. Schoch, O. Wormer

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 338 KB

english, 1994

53

Granular films of iron oxide prepared by aerosol deposition for the detection of organic vapours

P. Althainz, L. Schuy, J. Goschnick, H.J. Ache

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 364 KB

english, 1994

54

Photoassisted metal organic vapour-phase epitaxy of ZnTe on GaAs

Hervé Dumont, Bruno Qu'Hen, Jean-Eric Bourée, Wolf Kuhn, Ouri Gorochov

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 318 KB

english, 1994

55

The influence of deposits in a metal - organic chemical vapour deposition apparatus on the stability of precursors

Frank-René Lang, Klaus-Hermann Dahmen

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 347 KB

english, 1994

56

Oxide growth at a Si surface

L. Verdi, A. Miotello, R. Kelly

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 502 KB

english, 1994

57

Composition of thin films deposited by ion beam sputtering of a compound target: case of YBaCuO

S. Benayoun, E. Salmon, R.J. Gaboriaud

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 459 KB

english, 1994

58

TiNx magnetron sputter coating controlled by an in situ eddy current sensor

H. Klümper-Westkamp, P. Mayr

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 380 KB

english, 1994

59

Silver thin films deposited by magnetron sputtering

N. Maréchal, E. Quesnel, Y. Pauleau

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 453 KB

english, 1994

60

TiN layer synthesis by laser-plasma

A.L. Thomann, J. Hermann, C. Boulmer-Leborgne

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 459 KB

english, 1994

61

Laser assisted metallization of polyphenylquinoxaline

G. Shafeev, W. Marine, H. Dallaporta, L. Bellard, A. Cros

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 543 KB

english, 1994

62

SF6 sensitized CO2-laser chemical vapor deposition of a-Ge:H

M. Barth, P. Hess, G. Mollekopf, H. Stafast

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 512 KB

english, 1994

63

Laser based chemical vapour deposition of titanium nitride coatings

U. Illmann, R. Ebert, G. Reisse, H. Freller, P. Lorenz

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 448 KB

english, 1994

64

In-plane lattice constant relaxation during laser ablation of YBCO and yttria-stabilized zirconia

H. Karl, J. Hartmann, B. Stritzker

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 340 KB

english, 1994

65

Deposition by plasma-assisted laser ablation and maskless patterning of YBa2Cu3O7−x superconducting thin films

P. Tejedor, M. Cagigal, J.L. Vicent, F. Briones

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 462 KB

english, 1994

66

Pulsed laser induced modifications of metal silicide layers

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 899 KB

english, 1994

67

Microstructural evolution of non-hydrogenated amorphous carbon under ion beam assistance

Bernard André, François Rossi, A. van Veen, P.E. Mijnarends, H. Schut, Marie Paule Delplancke

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 316 KB

english, 1994

68

Morphological and structural studies of β-FeSi2 films grown by ion beam assisted deposition

A. Terrasi, S. Ravesi, C. Spinella, M.G. Grimaldi, A. La Mantia

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 387 KB

english, 1994

69

Ion beam induced chemical vapor deposition for the preparation of thin film oxides

D. Leinen, A. Fernández, J.P. Espinós, T.R. Belderrain, A.R. González-Elipe

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 290 KB

english, 1994

70

Degradation of thin films: comparison between low Earth orbit experiments and laboratory simulations of the space environment

John A. Woollam, R.A. Synowicki, Jeffrey S. Hale, N.J. Ianno, Blaine L. Spady, Arthur W. Moore, Paul Hambourger

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 315 KB

english, 1994

71

Plasma enhanced chemical vapour deposition of boron nitride onto InP

A. Bath, O. Baehr, M. Barrada, B. Lepley, P.J. van der Put, J. Schoonman

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 267 KB

english, 1994

72

Electron cyclotron resonance plasma ion beam effects on the formation of SiC on Si(001) characterized by in-situ photoemission

M. Diani, D. Aubel, J.L. Bischoff, L. Kubler, D. Bolmont

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 470 KB

english, 1994

73

Amorphous semiconductors: deposition chemistry and bonding

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 562 KB

english, 1994

74

Applications of rapid thermal chemical vapor deposition technology to ULSI material processing and device fabrication

U. Snnikrishnan, G.W. Yoon, D.L. Kwong

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 610 KB

english, 1994

75

On the relation between low-temperature epitaxial growth conditions and the surface morphology of epitaxial Si and Si1−xGex layers, grown in an ultrahigh vacuum, very low pressure chemical vapour deposition reactor

M. Caymax, J. Poortmans, A. Van Ammel, J. Vanhellemont, M. Libezny, J. Nijs, R. Mertens

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 469 KB

english, 1994

76

Growth methodologies and characterization of different polycrystalline diamond films on Ta substrates

M.L. Terranova, M. Rossi, V. Sessa, G. Vitali

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 490 KB

english, 1994

77

Low temperature deposition of glass membranes for gas sensors

P. Althainz, A. Dahlke, J. Goschnick, H.J. Ache

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 370 KB

english, 1994

78

Silicon oxide thin films grown by Xe2∗ excimer lamp chemical vapour deposition: the role of the substrate temperature and the window-substrate distance

P. González, E. García, J. Pou, D. Fernández, J. Serra, B. León, M. Pérez-Amor

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 308 KB

english, 1994

79

Chemical vapour deposition of silicon carbide on mesophase pitch-based carbon fibres

G. Emig, N. Popovska, G. Schoch

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 395 KB

english, 1994

80

Selective deposition of tungsten by chemical vapour deposition from SiH4 reduction of WF6

Ph. Gouy-Pailler, Ph. Lami, R. Morales

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 376 KB

english, 1994

81

Author index of volume 241

Journal:

Thin Solid Films

Année:

1994

Fichier:

PDF, 94 KB

1994

82

Subject index of volume 241

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 566 KB

english, 1994

83

Large-area selective thin film deposition by bias sputtering

S. Berg, I.V. Katardjiev, C. Nender, P. Carlsson

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 759 KB

english, 1994

84

In situ spectroscopic ellipsometry studies of interfaces of thin films deposited by PECVD

Journal:

Thin Solid Films

Année:

1994

Langue:

english

Fichier:

PDF, 515 KB

english, 1994