Thin film deposition of conductive tin oxide from tetramethyltin in a low pressure glow discharge diode reactor
Y. Farber, F. Khonsari-Arefi, J. AmourouxVolume:
241
Année:
1994
Langue:
english
Pages:
5
DOI:
10.1016/0040-6090(94)90442-1
Fichier:
PDF, 430 KB
english, 1994