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Volume 236

MRS Proceedings

Volume 236

1

The Synthesis of Metal Oxide Films from Compound Powder Targets

Stognij, A.I., Tokarev, V.V., Mitin, Yu.N.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 190 KB

english, 1991

2

Origin of the Laser-Induced Broad Band Luminescence from a WF6/H2/Ar Gas Mixture

Heszler, P., Mogyorósi, P., Carlsson, J.O.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 202 KB

english, 1991

3

Ablation of Single Crystal MgO by UV Excimer Irradiation

Webb, R. L., Jensen, L. C., Langford, S. C., Dickinson, J. T.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.43 MB

english, 1991

4

Low Temperature Silicon Oxidation with Electron Cyclotron Resonance Oxygen Plasma

Sung, K. T., Pang, S. W.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 364 KB

english, 1991

5

Characterization of the Depositing Flux in Laser Ablation Deposition (LAD).

Kools, Jacques C.S., Dieleman, Jan

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 290 KB

english, 1991

6

In-Situ Ellipsometry Study of Pulsed Laser Deposited ZnO Films

Pittal, Shakil, Mcconville, L.A., Tanno, N.J., Snyder, P.G.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 338 KB

english, 1991

7

Generation of Shock Waves in Confined Excimer Laser Ablation of Polyimide

Zweig, Adrian D., Deutsch, T.F.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 394 KB

english, 1991

8

Slim: a Personal Computer Based Software for Simulation of Laser Interaction with Materials

Singh, Rajiv K., Viatella, John

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 517 KB

english, 1991

9

Selective-Area Growth of Metal Oxide Films Induced by Patterned Excimer Laser Surface Photolysis

Kunz, R. R., Ehrlich, D. J., Melngailis, J., Horn, M. W.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.72 MB

english, 1991

10

Laser Cvd of Tungsten on Silicon Oxynitride

Izquierdo, R., Lecours, A., Meunier, M.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.03 MB

english, 1991

11

Surface Studies of Laser Processing of W on GaAs from WF6

Tabbal, M., Lecours, A., Izquierdo, R., Meunier, M., Yelon, A.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 360 KB

english, 1991

12

Diode Laser Induced Chemical Vapor Deposition of WSIx from WF6 and SiH4

Desjardins, P., Izquierdo, R., Meunier, M.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.11 MB

english, 1991

13

Thermal and Photoinduced Decomposition Pathways of Arsine on GaAs(100)

Zhu, X.-Y., Wolf, M., Huett, T., White, J. M.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 351 KB

english, 1991

14

Laser-Induced Deposition of Buried Insulator Lines in Mn-Zn Ferrite

Lu, Y.F., Takai, M.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.92 MB

english, 1991

15

Buried Quantum Well Structure Fabricated by in Situ EB Lithography

Kawanishi, H., Sugimoto, Y., Ishikawa, T., Tanaka, N., Hidaka, H.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.73 MB

english, 1991

16

Condensed Chlorine Etching of GaAs Induced by Excimer Laser Radiation

Freiler, M.B., Shih, Ming Chang, Haase, G., Scarmozzino, R., Osgood, R.M.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1006 KB

english, 1991

17

Demonstrating the Utility of Boron Based Precursor Molecules for Selective Area DepositIon in a Scanning Tunnelling Microscope

Perkins, F. Keith, Onellion, M., Lee, Sunwoo, Dowben, P.A.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.84 MB

english, 1991

18

GaAs and Si Assisted Etching using a Scanning Tunneling Microscope

Baba, Masakazu, Matsui, Shinji

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.76 MB

english, 1991

19

Electron Beam Induced Decomposition of Palladium Acetate

Stark, T.J., Mayer, T.M., Russell, P.E.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 973 KB

english, 1991

20

Nanometer Lithography by Fast Atom or Ion Beam Milling

Devaud, G., Fleming, J., Douglas, K.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 2.57 MB

english, 1991

21

Activation of the Si(100)/Cl2 Etching Reaction at High Cl2 Translational Energies

Campos, Francis X., Weaver, Gabriela C., Waltman, Curtis J., Leone, Stephen R.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 344 KB

english, 1991

22

Anisotropic Si Etching by a Supersonic Cl2 Beam

Teraoka, Yuden, Uesugi, Fumihiko, Nishiyama, Iwao

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 2.03 MB

english, 1991

23

Thin Film Processing with Ecr and Downstream Oxygen Plasmas

Hess, Dennis W.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 407 KB

english, 1991

24

Enhancement of Photoresist Etch Rates by Argon Metastables in a Plasma Afterglow Reactor

Koretsky, Milo D., Reimer, Jeffrey A.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 231 KB

english, 1991

25

The Formation of Rugged Surface Polycrystalline Silicon Using Cl2/O2 Plasmas: The Role of Oxygen

Ozawa, N., Ikegami, N., Miyakawa, Y., Kanamori, J.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 2.10 MB

english, 1991

26

Ebic Investigation of Etch Induced Defects in Silicon Introduced by Rie and Ribe.

Habermeier, H.-U., Eckstein, M., Ruf, C., Jäger-Waldau, G., Zwicker, G.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.11 MB

english, 1991

27

The Effects of P2S5 Surface Passivation on Dry Etched GaAs

Glembocki, O.J., Dagata, J.A., Dobisz, E.A., Katzer, D.S.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 419 KB

english, 1991

28

Nanostructure Fabrication: Dry Etching Damage

Doughty, G.F., Cheung, R., Foad, M.A., Rahman, M., Cameron, N.I., Johnson, N.P., Wang, P.D., Wilkinson, C.D.W.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 591 KB

english, 1991

29

Ge Surface Displacements Due to Low Energy Particles

Picraux, S. T., Horn, K. M., Chason, E., Tsao, J. Y., Bedrossian, P., Klitsner, T., Brice, D. K.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 407 KB

english, 1991

30

Evaluation of Semiconductor Lattice Damage Using a Newly-Developed Photodisplacement Laser Probe

Sumie, S., Takamatsu, H., Tsunaki, H., Nishimoto, Y., Nakai, Y

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 371 KB

english, 1991

31

Molecular Dynamics Simulations and Experimental Evidence for Deep Penetration by Channeled Ions During Low-Energy Ion Bombardment of III-V Semiconductors

Stoffel, N.G., Schwarz, S.A., Pudensi, M.A.A., Kash, K., Florez, L.T., Harbison, J.P., Wilkens, B.J.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 454 KB

english, 1991

32

Ion Beam Etching System for Mercury Cadmium Telluride and III-V Compound Semiconductors

Reeves, Geoffrey K., Leech, Patrick. W., Bond, Patrick

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 4.17 MB

english, 1991

33

Microstructures of Si(111) on Ion Sputtering and Electron Annealing

Al, R., Savage, T. S., Xu, P., Zhang, J. P., Marks, L. D.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 4.12 MB

english, 1991

34

X-Ray Fluorescence Determination of Low Metal Concentration in Surface Masking Layers on Organic Polymers

Hutton, Richard S., Taylor, Gary N.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 355 KB

english, 1991

35

Laser-Induced Desorption of in and Ga from Si(100) and Adsorbate Enhanced Surface Damage

Strupp, Paul G., Alstrin, April L., Korte, Brenda J., Leone, Stephen R.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 359 KB

english, 1991

36

Influence of Energy Deposited by Energetic Particle Bombardment on thin Film Characteristics

Winters, Harold F., Eckstein, W., Coufal, H.J.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 512 KB

english, 1991

37

Simulations of Low-Energy Ion Bombardment and Epitaxial Growth

Chason, E., Bedrossian, P., Tsao, J.Y., Dodson, B.W., Picraux, S.T.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 454 KB

english, 1991

38

Epitaxy and Chemical Reactions During Thin Film Formation from Low Energy Ions New Kinetic Pathways, New Phases and New Properties

Herbots, Nicole, Hellman, O.C., Vancauwenberghe, O.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 3.34 MB

english, 1991

39

Laser-Induced Dry Etching of GaAs with High Aspect Ratio

Lee, Cheon, Sayama, Hirokazu, Namba, Susumu, Takai, Mikio

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.01 MB

english, 1991

40

In Situ Observation of Growing Process of Particles in Silane Plasmas and Their Effects on Amorphous Silicon Deposition

Shiratani, Masaharu, Watanabe, Yukio

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 443 KB

english, 1991

41

Atomic Oxygen Plasma Effects on Cvd Deposited Diamond-Like Carbon Films

Hale, Jeffrey S., Synowicki, R.A., Nafis, S., Woollam, John A.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 285 KB

english, 1991

42

Hydrogen in Dielectric Film Formation from an Electron Cyclotron Resonance Plasma

Barbour, J. C., Stein, H. J.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 403 KB

english, 1991

43

Low Energy Ion Beam Modification of High Performance Polymer

Jeong, Hyo-Soo, White, R. C.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 338 KB

english, 1991

44

Laser Etching of Ceramics for Defining Slider Air-Bearing Surfaces for Magnetic Recording Heads

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 3.54 MB

english, 1991

45

Low-Energy Ar+ Implantation of Uhmw-Pe Fibers: Effect on Surface Energy, Chemistry, and Adhesion Characteristics

Schalek, R., Hlavacek, M., Grummon, D. S.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.44 MB

english, 1991

46

Si-N Bonding at the SiO2/Si Interfaces During Deposition of SiO2 by the Remote Pecvd Process

Ma, Y., Yasuda, T., Habermehl, S., Lucovsky, G.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 336 KB

english, 1991

47

Low Temperature Silicon Epitaxial Growth by Plasma Enhanced Chemical Vapor Deposition from SiH4/He/H2

Lin, Yung-Jen, Shieh, Ming-Deng, Lee, Chiapying, Yew, Tri-Rung

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.89 MB

english, 1991

48

Growth and High Resolution Tem Characterization of GexSi1−x/Si Hetero-Structures by Remote Plasma-Enhanced Chemical Vapor Deposition

Qian, R., Chung, I., Kinosky, D., Hsu, T., Irby, J., Mahajan, A., Thomas, S., Banerjee, S., Tasch, A.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 3.96 MB

english, 1991

49

Low Temperature UV Growth of SiO2 in O2 and N2O

Kazor, Asghar, Boyd, Ian W.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 315 KB

english, 1991

50

Excimer Laser Induced Modification of Teflon Surface into Silicon Carbide-Like

Okoshi, M., Toyoda, K., Murahara, M.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 293 KB

english, 1991

51

Excimer Laser-Induced Decomposition of Aluminum Nitride

Esrom, H., Zhang, J-Y, Pedraza, A.J.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 2.03 MB

english, 1991

52

Phosphorus and Boron Doping of Silicon Thin Films Using ArF Excimer Laser

Slaoui, A., Elliq, M., Pattyn, H., Fogarassy, E., Unamuno, S. De, Stuck, R.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 422 KB

english, 1991

53

Oxide Phase Formation in Excimer Laser Processed Ti Alloy

Jervis, T. R., Hubbard, K. M., Zocco, T. G.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 2.92 MB

english, 1991

54

Dynamics of Graphite Photoablation

Murray, P. T., Peeler, D.T., Dempsey, D. V.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 290 KB

english, 1991

55

Growth Mechanism and Film Properties in Pulsed Laser-Plasma Deposition

Metev, S., Meteva, K.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 358 KB

english, 1991

56

Effects of Processing Parameters on KrF Excimer Laser Ablation Deposited ZrO2 Films

Smith, Gary A., Chen, Li-Chyong, Chuang, Mei-Chen

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.55 MB

english, 1991

57

Synthesis and Characterization of PbO Films Grown by Pulsed Laser Deposition.

Zabinski, J.S., Donley, M.S., Dyhouse, V.J., Moore, R., McDevitt, N.T.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 489 KB

english, 1991

58

Processing of Y1Ba2Cu3O7-x Superconducting Thin Films on GaAs Substrates with Double Buffer Layers

Lee, Sang Yeol, Jia, Quanxi, Anderson, Wayne A., Shaw, David T.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 712 KB

english, 1991

59

Characterization of High Temperature Superconducting Thin Film Grown by Laser Ablation Method

Shimizu, K., Nobumasa, H., Nagai, N., Matsunobe, T., Kawai, T.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 202 KB

english, 1991

60

In Situ Characterization of the Pulsed Laser DepositIon of Magnetic Thin Films

Paul, A.J., Bonnell, D.W., Hastie, J.W., Schenck, P.K., Shull, R.D., Ritter, J.J.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 437 KB

english, 1991

61

Low Temperature Synthesis of Carbide Thin Films by Pulsed Laser Deposition (Pld)

Donley, M.S., Zabinski, J.S., Sessler, W.J., Dyhouse, V.J., Walck, S.D., McDevitt, N.T.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.73 MB

english, 1991

62

The Role of Hydrogen in Laser Deposition of Diamond-Like Carbon

Thebert-Peeler, D., Murray, P.T., Petry, L., Haas, T.W.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 321 KB

english, 1991

63

Growth of Bn Thin Films by Pulsed Laser Deposition

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.35 MB

english, 1991

64

Photophysics of Polyatomic Species Ejection Following Uv Laser Ablation of Single Crystal Bi2Sr2Ca1Cu2O8

Wiedeman, Lawrence, Kim, Hyun-Sook, Helvajian, Henry

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 372 KB

english, 1991

65

Comparison in Surface Modifications of Sintered and Single Crystal Ceramic Targets After Laser Ablation

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 5.50 MB

english, 1991

66

Uhv-Tem Studies of Laser-Induced Damage in Silicon

Savage, T. S., Xu, P., Ai, R., Dunn, D., Marks, L. D.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 3.69 MB

english, 1991

67

Laser Damage Thresholds of Several Metal-Containing Acrylic Polymers at Four Different Wavelengths.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 2.11 MB

english, 1991

68

Dry Etching of Copper at High Rates

Farkas, Janos, Rousseau, Francois, Chi, Kai-Ming, Kodas, Toivo T., Hampden-Smith, Mark J.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 235 KB

english, 1991

69

High Damage Threshold Optical Films for Excimer Lasers

Ito, H., Kajita, N., Minowa, Y., Yoshida, H., Ina, T.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 334 KB

english, 1991

70

Electron, Ion and Photon Beam Processing

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.97 MB

english, 1991

71

Photoablation Studies of Polymers, Quartz, and Semiconductors with Vacuum Ultraviolet Laser Radiation

Herman, Peter R., Chen, Boyi, Moore, David J., Canaga-Retnam, Mark

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 2.14 MB

english, 1991

72

Theoretical Aspects on Spatial Thickness Variations in Laser-Deposited Thin Films.

Singh, Rajiv K., Carignan, James

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 333 KB

english, 1991

73

Ambient Gas Effects on Debris Formed During KrF Laser Ablation of Polyimide

Küper, Stephan, Brannon, James

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 267 KB

english, 1991

74

Resistless Etching of SiO2 by Two Color Excimer Lasers

Obara, T., Murahara, M.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 710 KB

english, 1991

75

Surface Laser Plasma in Laser Treatment of Materials in High Pressure Gases

Smirnov, A., Dupuy, C., Flamant, G.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 353 KB

english, 1991

76

Excimer Laser Removal of Cr Contaminants from Polyimide Surfaces for Packaging Applications

Radhakrishnan, Gouri, Marquez, Nicholas, MÜller, Heinrich

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.93 MB

english, 1991

77

Photoinduced Selective Deposition of Aluminium Thin Film Using Dimethylaluminum Hydride

Hanabusa, Mitsugu, Ouchi, Hideki, Ishida, Kenji, Kawasaki, Masahiro, Shogen, Satoshi

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 282 KB

english, 1991

78

Simultaneous Fabrication of Insulator and Contact Holes by Excimer Laser

Aomori, S., Murahara, M.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 662 KB

english, 1991

79

A Fast Laser Alloying Process for the Selective Electroplating of Metal on SiO2 and Polyimide

Malba, Vincent, Bernhardt, Anthony F.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.04 MB

english, 1991

80

Laser Assisted Chemical Vapor Deposition of Cu from a New Cu Organometallic Complex

Han, Jaesung, Jensen, Klavs F., Norman, John A.T.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.23 MB

english, 1991

81

Pulsed Laser Planarization of Metals for IC Interconnect

Baseman, Robert J., Kuan, Tung-Sheng, Aboelfotoh, M. Osama, Andreshak, Joseph C., Turene, Frank E., Previti-Kelly, Rosemary A., Ryan, James G.

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 5.13 MB

english, 1991

82

Large Area Photochemical Dry Etching of Polymers with Incoherent Excimer UV Radiation

Esrom, Hilmar, Zhang, Jun-Ying, Kogelschatz, Ulrich

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 1.22 MB

english, 1991

83

Photon-Single Phonon Coupling at Polar Crystal Surfaces: Infrared Optical Anisotropy Spectra

Mochan, W. Luis, Recamier, Jose, Monsivais, Guillermo, Barriga, Lucia Diaz

Journal:

MRS Proceedings

Année:

1991

Langue:

english

Fichier:

PDF, 350 KB

english, 1991