Volume 30; Issue 8

2

High silicon etch rates by hot filament generated atomic hydrogen

Année:
1997
Langue:
english
Fichier:
PDF, 83 KB
english, 1997
3

Modelling of plasma chemical processes in pulsed corona discharges

Année:
1997
Langue:
english
Fichier:
PDF, 107 KB
english, 1997
6

The force acting on a moving current loop above a conducting plate

Année:
1997
Langue:
english
Fichier:
PDF, 146 KB
english, 1997
10

The effect of laser-induced photodetachment in rf discharges

Année:
1997
Langue:
english
Fichier:
PDF, 230 KB
english, 1997