Measurement of static and dynamic mechanical behavior of micro and nano-scale thin metal films: using micro-cantilever beam deflection
Ya-Chi Cheng, Chi-Jia Tong, Ming-Tzer LinVolume:
17
Langue:
english
Pages:
10
DOI:
10.1007/s00542-010-1202-x
Date:
April, 2011
Fichier:
PDF, 657 KB
english, 2011