Modeling of Self-Aligned Silicidation in 2D and 3D: Growth Suppression by Oxygen Diffusion
Moroz, Victor, Okada, TakakoVolume:
611
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-611-c9.3.1
Date:
January, 2000
Fichier:
PDF, 116 KB
english, 2000