The Potential Effect of Multilayer Patterns on Temperature Uniformity During Rapid Thermal Processing
Hebb, Jeffrey P., Jensen, Klavs F., Egan, Erik W.Volume:
389
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-389-293
Date:
January, 1995
Fichier:
PDF, 476 KB
english, 1995