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Impact of a Vicinal Growth Surface on AlAs / GaAs Superlattice Layer Thickness Measurements with Double Crystal X-ray Diffraction
Leiberich, A., Levkoff, J., Robertson, A.Volume:
240
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-240-177
Date:
January, 1991
Fichier:
PDF, 282 KB
english, 1991