The Effect of Line Geometry on Void Growth in Thin, Narrow Aluminum Lines
Borgesen, P., Lee, J. K., Korhonen, M. A., Li, C.-Y.Volume:
226
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-226-407
Date:
January, 1991
Fichier:
PDF, 340 KB
english, 1991