High Quality Si and Sil-xGex, Films and Heterojunction Bipolar Transistors Grown by Rapid Thermal Chemical Vapor Deposition (RTCVD)
Green, M. L., Brasen, D., Temkin, H., Kannan, V. C., Luftman, H. S.Volume:
146
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-146-55
Date:
January, 1989
Fichier:
PDF, 740 KB
english, 1989