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Thermal decomposition pathway of Ge and Si oxides: observation of a distinct difference
K Prabhakaran, F Maeda, Y Watanabe, T OginoVolume:
369
Année:
2000
Langue:
english
Pages:
4
DOI:
10.1016/s0040-6090(00)00881-6
Fichier:
PDF, 201 KB
english, 2000