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Optimization of AlGaN films grown by RF atomic nitrogen plasma using in-situ cathodoluminescence
J.M. Van Hove, P.P. Chow, A.M. Wowchak, J.J. Klaassen, M.F. Rosamond, D.R. CroswellVolume:
175-176
Année:
1997
Langue:
english
Pages:
5
DOI:
10.1016/s0022-0248(97)00869-5
Fichier:
PDF, 426 KB
english, 1997