
Prediction of thermo-mechanical integrity of wafer backend processes
V. Gonda, J.M.J. Den Toonder, J. Beijer, G.Q. Zhang, W.D. van Driel, R.J.O.M. Hoofman, L.J. ErnstVolume:
44
Année:
2004
Langue:
english
Pages:
7
DOI:
10.1016/j.microrel.2004.05.021
Fichier:
PDF, 426 KB
english, 2004