Possible Gas-Phase Reactions of H 2 /CH 4 /Tetramethylsilane in Diamond/β-SiC Nanocomposite Film Deposition: An Ab-Initio Study
Zhao, Y. L., Zhang, R. Q., Srikanth, Vadali. V. S. S., Jiang, X.Volume:
111
Langue:
english
Journal:
The Journal of Physical Chemistry A
DOI:
10.1021/jp070014s
Date:
May, 2007
Fichier:
PDF, 209 KB
english, 2007