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Investigation of New 2,5-Dimethylpyrrolyl Titanium Alkylamide and Alkoxide Complexes as Precursors for the Liquid Injection MOCVD of TiO2
Kate Black, Anthony C. Jones, John Bacsa, Paul R. Chalker, Paul A. Marshall, Hywel O. Davies, Peter N. Heys, Paul O'Brien, Mohammad Afzaal, James Raftery, Gary W. CritchlowVolume:
16
Année:
2010
Langue:
english
Pages:
7
DOI:
10.1002/cvde.200906818
Fichier:
PDF, 287 KB
english, 2010