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Atomic Layer Deposition of BaTiO3 Thin Films—Effect of Barium Hydroxide Formation
M. Vehkamäki, T. Hatanpää, M. Ritala, M. Leskelä, S. Väyrynen, E. RauhalaVolume:
13
Année:
2007
Langue:
english
Pages:
8
DOI:
10.1002/cvde.200606538
Fichier:
PDF, 394 KB
english, 2007