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Kinetics and Film Properties of Boron Nitride Derived from Trimethoxyborane/Ammonia by Chemical Vapor Deposition
H. Strakov, G. Hackl, N. Popovska, H. GerhardVolume:
10
Année:
2004
Langue:
english
Pages:
6
DOI:
10.1002/cvde.200306311
Fichier:
PDF, 392 KB
english, 2004