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Megasonic cleaning of wafers in electrolyte solutions: Possible role of electro-acoustic and cavitation effects

M. Keswani, S. Raghavan, P. Deymier, S. Verhaverbeke

Journal:

Microelectronic Engineering

Année:

2009

Langue:

english

Fichier:

PDF, 404 KB

english, 2009

[IEEE Proceedings of IEEE International Electron Devices Meeting - San Francisco, CA, USA (1989.12.3-1989.12.6)] International Technical Digest on Electron Devices Meeting - Wet and dry HF-last cleaning process for high-integrity gate oxides

Werkhoven,, Granneman,, Hendriks,, de Blank,, Verhaverbeke,, Mertens,, Meuris,, Vandervorst,, Heijns,, Philipossian,

Année:

1992

Langue:

english

Fichier:

PDF, 346 KB

english, 1992

Cleaning technology for improved gate oxide integrity

M. Meuris, S. Verhaverbeke, P.W. Mertens, H.F. Schmidt, M.M. Heyns, M. Kubota, A. Philipossian, K. Dillenbeck, D. Gräf, A. Schnegg, R. de Blank

Journal:

Microelectronic Engineering

Année:

1993

Langue:

english

Fichier:

PDF, 655 KB

english, 1993

Handbook for Cleaning/Decontamination of Surfaces || Cleaning of Trace Metallic Impurities from Solid Substrates Using Liquid Media

Verhaverbeke, Steven

Année:

2007

Langue:

english

Fichier:

PDF, 3.64 MB

english, 2007

The Relationship of the Silicon Surface Roughness and Gate Oxide Integrity in NH 4 OH/H 2 O 2 Mixtures

Meuris, M., Verhaverbeke, S., Mertens, P. W., Heyns, M. M., Hellemans, L., Bruynseraede, Y., Philipossian, A.

Journal:

Japanese Journal of Applied Physics

Année:

1992

Fichier:

PDF, 664 KB

1992

Poly-gate structures manufactured in a cluster tool

M. Hendriks, R. de Blank, E. Lindow, J. Mulder, E. Granneman, S. Verhaverbeke, W. Vandervorst, M. Heyns

Journal:

Applied Surface Science

Année:

1993

Langue:

english

Fichier:

PDF, 378 KB

english, 1993

Facile Synthesis of Bimetallic Ag/Ni Core/Sheath Nanowires and Their Magnetic and Electrical Properties

Maureen McKiernan, Jie Zeng, Sunzida Ferdous, Steven Verhaverbeke, Kurtis S. Leschkies, Roman Gouk, Christopher Lazik, Miao Jin, Alejandro L. Briseno, Younan Xia

Journal:

Small

Année:

2010

Langue:

english

Fichier:

PDF, 712 KB

english, 2010

[IEEE International Electron Devices Meeting 1991 [Technical Digest] - Washington, DC, USA (8-11 Dec. 1991)] International Electron Devices Meeting 1991 [Technical Digest] - The effect of metallic impurities on the dielectric breakdown of oxides and some new ways of avoiding them

Verhaverbeke, S., Meuris, M., Mertens, P.W., Heyns, M.M., Philipossian, A., Graf, D., Schnegg, A.

Année:

1991

Langue:

english

Fichier:

PDF, 367 KB

english, 1991

The Etching Mechanisms of SiO[sub 2] in Hydrofluoric Acid

Verhaverbeke, S.

Journal:

Journal of The Electrochemical Society

Année:

1994

Langue:

english

Fichier:

PDF, 736 KB

english, 1994

Surface reconstruction of hydrogen annealed (100) silicon

Bender, H., Verhaverbeke, S., Caymax, M., Vatel, O., Heyns, M. M.

Journal:

Journal of Applied Physics

Année:

1994

Langue:

english

Fichier:

PDF, 585 KB

english, 1994

[IEEE Proceedings of IEEE International Electron Devices Meeting - San Francisco, CA, USA (1989.12.3-1989.12.6)] International Technical Digest on Electron Devices Meeting - A high-selectivity native oxide removal process for native oxide free processes

Verhaverbeke,, Iacovacci,, Mertens,, Meuris,, Heyns,, Schreutelkamp,, Maex,, Alay,, Vandervorst,, De Blank,, Kubota,, Philipossian,

Année:

1992

Langue:

english

Fichier:

PDF, 319 KB

english, 1992

[IEEE Symposium on VLSI Technology - Kyoto, Japan (1997.06.12-1997.06.12)] Symposium on VLSI Technology - Strategy For Gate-Oxide Yield Improvement On CZ And EPI Wafers

Mertens,, Schmidt,, Meuris,, Verhaverbeke,, Graef,, Dillenbeck,, Salem,, Heyns,

Année:

1993

Langue:

english

Fichier:

PDF, 216 KB

english, 1993

[IEEE 1992 Symposium on VLSI Technology Digest of Technical Papers - Seattle, WA, USA (2-4 June 1992)] 1992 Symposium on VLSI Technology Digest of Technical Papers - A new modified HF-last cleaning process for high-performance gate dielectrics

Verhaverbeke, S., Meuris, M., Schaekers, M., Haspeslagh, L., Mertens, P., Heyns, M.M., De Blank, R., Philipossian, A.

Année:

1992

Langue:

english

Fichier:

PDF, 195 KB

english, 1992

[IEEE ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. - San Jose, CA, USA (2005.09.13-2005.09.15)] ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. - Reliability improvement of Cu/low-k interconnects by integrating novel single pass single wafer wet clean

Chang, R., Jianshe Tang,, Verhaverbeke, S., Smekalin, K., Lee, J.T.C., Armacost, M.D.

Année:

2005

Langue:

english

Fichier:

PDF, 1.96 MB

english, 2005

Development of an All-Wet-Etch Process Chemistry for the Patterning of Metal Conductors in Igzo Thin-Film-Transistors

Leschkies, K., Verhaverbeke, S., Yim, D. K., Hsu, H. C., Kim, H., Lim, R., White, J. M., Visser, R. J.

Journal:

ECS Transactions

Année:

2013

Langue:

english

Fichier:

PDF, 1.41 MB

english, 2013

Investigations of solution variables in a contactless copper electrodeposition process for 3D packaging applications

Weber, C., Patterson, Z., Zhao, M., Balachandran, R., Gouk, R., Verhaverbeke, S., Shadman, F., Keswani, M.

Journal:

Materials Science in Semiconductor Processing

Année:

2015

Langue:

english

Fichier:

PDF, 1.93 MB

english, 2015

Mechanism and Principles of Post Etch Al Cleaning with Inorganic Acids

Verhaverbeke, Steven, Gouk, Roman, Papanu, Jim, Chen, Han Wen

Journal:

Solid State Phenomena

Année:

2008

Langue:

english

Fichier:

PDF, 1.02 MB

english, 2008

A Novel Vapor Phase Etching Process for Si

Verhaverbeke, Steven

Journal:

Solid State Phenomena

Année:

2009

Langue:

english

Fichier:

PDF, 10.73 MB

english, 2009

A Technique for Contactless Copper Electrodeposition for 3D Packaging Applications

Patterson, Z., Weber, C., Balachandran, R., Gouk, R., Verhaverbeke, S., Keswani, M.

Journal:

ECS Electrochemistry Letters

Année:

2014

Langue:

english

Fichier:

PDF, 373 KB

english, 2014

Surfactant Selection for AM Clean in a Single Wafer Oasis Wet System

Baker, Jennifer, Beaudry, Christopher, Morinaga, Hitoshi, Verhaverbeke, Steven

Journal:

Solid State Phenomena

Année:

2003

Fichier:

PDF, 277 KB

2003

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Novel Wet Photoresist Strip for Wafer Level Packaging

Verhaverbeke, Steven, Zhao, Jun

Année:

2007

Langue:

english

Fichier:

PDF, 211 KB

english, 2007

Aqueous Based Single Wafer Cu/Low-k Cleaning Process Characterization and Integration into Dual Damascene Process Flow

Tang, Jian She, Brown, Brian J., Verhaverbeke, Steven, Chen, Han Wen, Papanu, Jim, Hung, Raymond, Cai, Cathy, Yost, Dennis

Journal:

Solid State Phenomena

Année:

2005

Langue:

english

Fichier:

PDF, 903 KB

english, 2005

Wet Cleaning of Trenches and Vias after Oxide/Nitride Dry Etch with Cu Exposed

Verhaverbeke, Steven, Shao, Jason Chi-Hao, Liu, Lewis

Journal:

Solid State Phenomena

Année:

2001

Fichier:

PDF, 308 KB

2001

Novel Texture Etch Chemistry for Transparent Conducting Oxides Used in Photovoltaic Cells

Verhaverbeke, Steven, Gouk, Roman, Leschkies, Kurtis, Visser, Robert

Journal:

Solid State Phenomena

Année:

2012

Langue:

english

Fichier:

PDF, 646 KB

english, 2012

Using Megasonics for Particle and Residue Removal in Single Wafer Cleaning

Verhaverbeke, Steven, Gouk, Roman, Yost, Dennis

Journal:

Solid State Phenomena

Année:

2005

Langue:

english

Fichier:

PDF, 286 KB

english, 2005

Metallic Contamination Removal Evaluation for Single Wafer Processing

Boelen, Pieter, Verhaverbeke, Steven, Garnier, Philippe, Levy, Didier, Morinaga, Hitoshi

Journal:

Solid State Phenomena

Année:

2003

Fichier:

PDF, 328 KB

2003

Non-Stiction Performance of Various Post Wet-Clean Drying Schemes on High-Aspect-Ratio Device Structures

Chen, H.-W., Gouk, R., Verhaverbeke, S., Visser, R. J.

Journal:

ECS Transactions

Année:

2013

Langue:

english

Fichier:

PDF, 1.59 MB

english, 2013

Contactless bottom-up electrodeposition of nickel for 3D integrated circuits

Zhao, Mingrui, Balachandran, Rajesh, Patterson, Zach, Gouk, Roman, Verhaverbeke, Steven, Shadman, Farhang, Keswani, Manish

Journal:

RSC Advances

Année:

2015

Langue:

english

Fichier:

PDF, 946 KB

english, 2015

Generation at Point-of-Use of BHF

Verhaverbeke, Steven, Liu, L.H.

Journal:

Solid State Phenomena

Année:

1999

Fichier:

PDF, 491 KB

1999

Surface modification and contamination characterization of ion-enhanced, implanted photoresist removal

M. N. Kawaguchi, J. S. Papanu, H. Chen, B. Su, S. Verhaverbeke

Année:

2007

Langue:

english

Fichier:

PDF, 431 KB

english, 2007

Improvement of Rinsing Efficiency after Sulfuric Acid Hydrogen Peroxide Mixture (H2SO4/H2O2) by HF Addition

R. Messoussi, S. Verhaverbeke, T. Yabune, M. Nose, T. Ohmi

Année:

1996

Fichier:

PDF, 736 KB

1996

Atomic Force Microscopy and Infrared Spectroscopy Studies of Hydrogen Baked Si Surfaces

O. Vatel, S. Verhaverbeke, H. Bender, M. Caymax, F. Chollet, B. Vermeire, P. Mertens, E. André, M. Heyns

Année:

1993

Fichier:

PDF, 744 KB

1993

Critical Parameters for Obtaining Low Particle Densities on a Si Surface in an HF-Last Process

Alay, Josep-Lluís, Verhaverbeke, Steven, Vandervorst, Wilfried, Heyns, Marc

Journal:

Japanese Journal of Applied Physics

Année:

1993

Fichier:

PDF, 600 KB

1993

SPIE Proceedings [SPIE 22nd European Mask and Lithography Conference - Dresden, Germany (Monday 23 January 2006)] 22nd European Mask and Lithography Conference - Advanced processes for photomask damage-free cleaning and photoresist removal

Papanu, James S., Gouk, Roman, Chen, Han-Wen, Boelen, Pieter, Peters, Phillip, Belisle, Michael, Verhaverbeke, Steven, Ko, Alexander, Child, Kent, Martinez, Elias, Behringer, Uwe F. W.

Année:

2006

Langue:

english

Fichier:

PDF, 195 KB

english, 2006

The Role of HO2− in SC-1 Cleaning Solutions

Verhaverbeke, Steven, Parker, Jennifer W., McConnell, Chris F.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 508 KB

english, 1997

Cleaning Procedures for UHV Cluster-tool MOS Fabrication

Sofield, C J, Murrell, M P, Sugden, S, Heyns, M, Verhaverbeke, S, Welland, M E, Golan, B, Barnes, J

Journal:

MRS Proceedings

Année:

1992

Langue:

english

Fichier:

PDF, 2.21 MB

english, 1992

Surface Characterisation of Si After HF Treatments and its Influence on the Dielectric Breakdown of Thermal Oxides

Verhaverbeke, S., Alay, J., Mertens, P., Meuris, M., Heyns, M., Vandervorst, W., Murrell, M., Sofield, C.

Journal:

MRS Proceedings

Année:

1992

Langue:

english

Fichier:

PDF, 466 KB

english, 1992

HF-last cleanings : a study of the properties with respect to the different variables

Verhaverbeke, S., Bender, H., Meuris, M., Mertens, P.P., Schmidt, H.H., Heyns, M.M.

Journal:

MRS Proceedings

Année:

1993

Langue:

english

Fichier:

PDF, 493 KB

english, 1993

Cluster-Tool Integrated HF Vapor Etching for Native Oxide Free Processing

Werkhoven, Chris, Granneman, Ernst, Kwakman, Loek, Hendriks, Menso, Verhaverbeke, Steven, Heyns, Marc, Bender, Hugo

Journal:

MRS Proceedings

Année:

1993

Langue:

english

Fichier:

PDF, 853 KB

english, 1993

New Wet Cleaning Strategies for Obtaining Highly Reliable thin Oxides

Heyns, M.M., Verhaverbeke, S., Meuris, M., Mertens, P.P., Schmidt, H., Kubota, M., Philipossian, A., Dillenbeck, K., GRäF, D., Schnegg, A., de Blank, R.

Journal:

MRS Proceedings

Année:

1993

Langue:

english

Fichier:

PDF, 677 KB

english, 1993

Recent Advances in Wet Processing Technology and Science

Verhaverbeke, Steven, Messoussi, Rochdi, Morinaga, Hitoshi, Ohmi, Tadahiro

Journal:

MRS Proceedings

Année:

1995

Langue:

english

Fichier:

PDF, 618 KB

english, 1995

A Model for the Etching of Ti and Tin in SC-1 Solutions

Verhaverbeke, Steven, Parker, Jennifer W.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 1.55 MB

english, 1997

SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Advanced mask cleaning techniques for sub-100-nm technology nodes

Papanu, James S., Weed, J. Tracy, Martin, Patrick M., Gouk, Roman, Franklin, Cole, Chen, Han-Wen, Verhaverbeke, Steven, Ko, Alexander, Child, Kent, Boelen, Pieter, Shrauti, Suresh, Martinez, Elias, Br

Année:

2005

Langue:

english

Fichier:

PDF, 419 KB

english, 2005

(Invited) Supercritical Drying: A Sustainable Solution to Pattern Collapse of High-Aspect-Ratio and Low-Mechanical-Strength Device Structures

Chen, H.-W., Verhaverbeke, S., Gouk, R., Leschkies, K., Sun, S., Bekiaris, N., Visser, R. J.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 883 KB

english, 2015