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Volume 32; Issue 2

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IEEE Transactions on Semiconductor Manufacturing
Volume 32; Issue 2

IEEE Transactions on Semiconductor Manufacturing

Volume 32; Issue 2

1

Feature Extraction From Analog Wafermaps: A Comparison of Classical Image Processing and a Deep Generative Model

Santos, Tiago, Schrunner, Stefan, Geiger, Bernhard C., Pfeiler, Olivia, Zernig, Anja, Kaestner, Andre, Kern, Roman

Journal:

IEEE Transactions on Semiconductor Manufacturing

Année:

2019

Langue:

english

Fichier:

PDF, 37 KB

english, 2019

2

Research Into the LSTM Neural Network-Based Crystal Growth Process Model Identification

Zhang, Jing, Tang, Qinwei, Liu, Ding

Journal:

IEEE Transactions on Semiconductor Manufacturing

Année:

2019

Fichier:

PDF, 1.18 MB

2019

3

A Novel Method for Deposit Accumulation Assessment in Dry Etching Chamber

Li, Pin, Jia, Xiaodong, Sumiya, Masahiro, Kamaji, Yoshito, Ishiguro, Masaki, Pahren, Laura, Lee, Jay

Journal:

IEEE Transactions on Semiconductor Manufacturing

Année:

2019

Langue:

english

Fichier:

PDF, 4.22 MB

english, 2019

4

A Novel Method for Deposit Accumulation Assessment in Dry Etching Chamber

Li, Pin, Jia, Xiaodong, Sumiya, Masahiro, Kamaji, Yoshito, Ishiguro, Masaki, Pahren, Laura, Lee, Jay

Journal:

IEEE Transactions on Semiconductor Manufacturing

Année:

2019

Fichier:

PDF, 4.22 MB

2019

5

Ultra Wide Band Gap Semiconductors for Power Control and Conversion

Journal:

IEEE Transactions on Semiconductor Manufacturing

Année:

2019

Fichier:

PDF, 1.36 MB

2019

6

Editorial 2018 Best Paper Award

Journal:

IEEE Transactions on Semiconductor Manufacturing

Année:

2019

Langue:

english

Fichier:

PDF, 485 KB

english, 2019