Volume 69; Issue 8

Main
ECS Transactions
Volume 69; Issue 8

ECS Transactions

Volume 69; Issue 8

1

Dual-Fluid Spray Process for Particle and Fluorocarbon-Polymer Removal in BEOL Applications

Iwasaki, A., Higuchi, A., Komori, K., Sato, M., Shirakawa, H.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 344 KB

english, 2015

2

Etching of Silicon Nitride in 3D NAND Structures

Bassett, D., Printz, W., Furukawa, T.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 337 KB

english, 2015

3

Nanoscale Etching: Dissolution of III-As and Ge in HCl/H2O2 Solutions

van Dorp, D. H., Weinberger, D., Van Wonterghem, S., Arnauts, S., Strubbe, K., Holsteyns, F., De Gendt, S.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 1022 KB

english, 2015

4

Chemical Treatments for Native Oxides Removal of GaAs Wafers

Rebaud, M., Roure, M.-C., Loup, V., Rodriguez, P., Martinez, E., Besson, P.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 146 KB

english, 2015

5

Cleaning of InGaAs and InP Layers for Nanoelectronics and Photonics Contact Technology Applications

Rodriguez, P., Toselli, L., Ghegin, E., Rebaud, M., Rochat, N., Chevalier, N., Martinez, E., Nemouchi, F.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 649 KB

english, 2015

6

Wet Processing for Post-epi & Pre-furnace Cleans in Silicon Carbide Power MOSFET Fabrication

McMahon, J. J., Jahanbani, M., Arthur, S., Lilienfeld, D., Gipp, P., Gorczyca, T., Formica, J., Shen, L., Yamagami, M., Hillard, B., Byrnes, J.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 8.10 MB

english, 2015

7

Optimizing Middle of Line (MoL) Contact Cleaning to Preserve Tungsten (W) Integrity in Advanced Technology Nodes

Singh, S., Muralidhar, P., Das, K., Scott, S.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 260 KB

english, 2015

8

(Invited) Ultrapure Water for Advance Semiconductor Manufacturing: Challenges and Opportunities

Libman, S., Wilcox, D., Zerfas, B.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 476 KB

english, 2015

9

Chemical Passivation of In0.53Ga0.47As(100) Using Ammonium Sulfide and Thiols

Contreras, Y., Muscat, A. J.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 422 KB

english, 2015

10

Behavior of Nickel Deposition on Silicon Wafers from TMAH and Ammonia based SC1 Cleaning Process

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 150 KB

english, 2015

11

Surface Chemistry of III-V Semiconductors After Wet Etching with HCl and H2O2

Mancheno-Posso, P., Muscat, A. J.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 1.37 MB

english, 2015

12

Enhanced Point of Use Filtration for Cleaning without Small Particle Addition

Kweskin, S. J., Chen, P., Ham, S., Phely-Bobin, T., Patel, A.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 126 KB

english, 2015

13

Prevention of Metal Contamination in Sub 50 Nm SC1 Cleaning Process

Kim, H.-T., Park, G.-H., Cho, B.-J., Lee, J.-H., Kim, M.-S., Kim, J.-Y., Park, J.-G.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 5.90 MB

english, 2015

14

Selective Silicon Nitride Etch with Hot Diluted HF- an Alternative to Orthophosphoric Acid

Garnier, P., Neyens, M., Massin, T., Thomassin, D., Maurice, C.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 297 KB

english, 2015

15

Contamination Specifications, an Overall Perspective

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 139 KB

english, 2015

16

Post Salicidation Clean: Removal of Unreacted Pt from High Pt Content NiPt Silicide

Sehgal, A., Derderian, G., Muralidhar, P.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 832 KB

english, 2015

17

(Invited) Supercritical Drying: A Sustainable Solution to Pattern Collapse of High-Aspect-Ratio and Low-Mechanical-Strength Device Structures

Chen, H.-W., Verhaverbeke, S., Gouk, R., Leschkies, K., Sun, S., Bekiaris, N., Visser, R. J.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 883 KB

english, 2015

18

Sulfate Adsorption onto and Desorption from Silicon Dioxide Films

Wu, B., Raghavan, S.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 206 KB

english, 2015

19

Effect of Particle Contamination on Extreme Ultraviolet (EUV) Mask and Megasonic Cleaning Process for Its Removal

Kim, M.-S., Ji, H.-R., Choi, I.-C., Kim, H.-T., Jang, S.-H., Lee, J., Kim, I.-S., Kim, J.-H., Oh, H.-K., Ahn, J.-H., Park, J.-G.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 492 KB

english, 2015

20

(Invited) Understanding and Controlling Electrochemical Effects in Wet Processing

Raghavan, S., Chiang, C.-C.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 6.87 MB

english, 2015

21

Submicron Particle Removal during FPD Oxide TFT Process

Lee, J., Kim, M.-S., Kim, H.-T., Choi, I.-C., Kim, W.-Y., Lim, D.-S., Park, J.-G.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 419 KB

english, 2015

22

Development of a Cu and W Compatible PERR Clean in BEOL Advanced Interconnect Patterning

Kesters, E., Le, Q. T., Decoster, S., Vega Gonzalez, V., Holsteyns, F., De Gendt, S.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 746 KB

english, 2015

23

Surface Cleaning of SiGe(100) and Passivation of Ge(100) with Aqeuous Ammonium Sulfide

Heslop, S. L., Engesser, P., Okorn-Schmidt, H. F., Muscat, A. J.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 7.49 MB

english, 2015

24

(Invited) Selective Etch of Si and SiGe for Gate All-Around Device Architecture

Wostyn, K., Sebaai, F., Rip, J., Mertens, H., Witters, L., Loo, R., Hikavyy, A. Y., Milenin, A., Horiguchi, N., Collaert, N., Thean, A., Mertens, P. W., De Gendt, S., Holsteyns, F.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 250 KB

english, 2015

25

(Invited) Reaction Mechanisms on Binary III-V Semiconductor Surfaces during Etching, Passivation, and Deposition

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 657 KB

english, 2015

26

Real-Time pH Monitoring of Ultra-Diluted Chemistry with a Micro-Sampling pH Monitor

Nakai, Y., Miyamura, K., Takagi, S., Mori, Y.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 145 KB

english, 2015

27

Evaluation of InGaAs and InP Compatibility with Alkaline Photoresist Stripping Formulations

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 83 KB

english, 2015

28

Effects of Diluted-NH4OH as Conductive Rinse Water in Single Wafer Cleaning Processes

Hayashi, Y., Kawakami, M., Yano, D., Yamanaka, K.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 513 KB

english, 2015

29

Advanced Wet-Etch-Only Process for Complete Tri-Layer Rework

Steinke, P., Calvo, J., Uhlig, B.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 253 KB

english, 2015

30

Wet Etchant Diffusion through Photoresist during Gate Oxide Patterning

Neyens, M., Garnier, P., Garach, M., Rochat, N., Licitra, C., Tiron, R.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 612 KB

english, 2015

31

Effect of Surface Energy Reduction for Nano-Structure Stiction

Koide, T., Kimura, S., Iimori, H., Sugita, T., Sato, K., Sato, Y., Ogawa, Y.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 253 KB

english, 2015

32

Dissolution of Germanium in Sulfuric Acid Based Solutions

Gan, N., Ogawa, Y., Nagai, T., Masaoka, T., Wostyn, K., Sebaai, F., Holsteyns, F., Mertens, P. W.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 617 KB

english, 2015

33

Oxygen Control Challenge for Advanced Wet Processing

Yoshida, Y., Otsuji, M., Takahashi, H., Snow, J., Sebaai, F., Holsteyns, F., Mertens, P. W., Sato, M., Shirakawa, H., Uchida, H.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 4.36 MB

english, 2015

34

Acoustic Characterization of Patterning Degradation during Wet Etching

Virgilio, C., Garnier, P., Foucaud, M., Devos, A., Pinceau, D., Carlier, J., Campistron, P., Nongaillard, B., Neyens, M., Broussous, L.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 324 KB

english, 2015

35

Dewetting Model Study on a Spinning Substrate - Challenges for Low Chemical Consumption

Sano, K.-i., Mui, D., Kawaguchi, M.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 459 KB

english, 2015

36

(Invited) Metallic Contamination Control in Advanced ULSI Processing

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 2.84 MB

english, 2015