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Volume 502

MRS Proceedings

Volume 502

1

Silicon Rapid Thermal Processing with Ripple Pyrometry

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 488 KB

english, 1997

2

Monitoring and Control in Vapor phase Epitaxy

Pearsall, T. P.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 522 KB

english, 1997

3

Diode-laser-based Atomic Absorption Monitors for Physical Vapor Deposition Process Control

Wang, Weizhi, Hammond, R. H., Fejer, M. M., Beasley, M. R.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 534 KB

english, 1997

4

In situ Monitoring of the Effects of Gas Mixtures on Ion Beam Depositions of Diamond-Like Carbon Films

Wu, R. L. C., Lanter, W., Monreal, R., Kosel, P. B., Miyoshi, K.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 334 KB

english, 1997

5

SPA Monitoring of GaN Movpe Surface

Kobayashi, Naoki, Kobayashi, Yasuyuki

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 376 KB

english, 1997

6

X-Ray Absorption Spectroscopy as an in-situ Tool in Materials Science

Ressler, T., Wong, Joe, Metz, W.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 444 KB

english, 1997

7

Polycapillary Optics for in Situ Diagnostics

Hofmann, F. A., Gao, N., Owens, S. M., Gibson, W. M., Macdonald, C. A., Lee, S. M.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 3.17 MB

english, 1997

8

In-situ Characterization of Laser Deposited Fe/Ag Multilayers by a Combination of Time-of-Flight, Rheed and Resistance Measurements

Fähler, Sebastian, Weisheit, Martin, Krebs, Hans-Ulrich

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 1.91 MB

english, 1997

9

Effect of Current Distribution on Quartz Crystal Microbalance Measurements

Kelly, James J., Durning, Christopher J., West, Alan C.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 840 KB

english, 1997

10

In-Situ Fourier Transform Infrared Spectroscopy for Real-Time Diagnostics of Thin Film Processes

Solomon, P. R., Charpenay, S., Zhang, W., Bonanno, A. S., Rosenthal, P. A., Cosgrove, J. E., Kinsella, K. K, Kung, P. J.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 400 KB

english, 1997

11

In situ Characterization of Functional Organic Thin Films by Energy Dispersive Grazing Incidence X-ray Diffraction

Yoshida, Yuji, Takiguchi, Hiroshi, Tanigaki, Nobutaka, Yase, Kiyoshi

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 1.73 MB

english, 1997

12

Monitoring of Sidewall Spacer Etch by Optical Emission Spectroscopy and Mass Spectroscopy

Min, K., Chambers, J. J., Parsons, G. N., Hauser, J. R.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 899 KB

english, 1997

13

Particle and UV-Imaging with Position Sensitive MCP-Detectors-Three-Dimensional Momentum Space Imaging

Mergel, V., Jagutzki, O., Spielberger, L., Ullmann-Pfleger, K., Dörner, R., Schmidt-Böcking, H.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 3.84 MB

english, 1997

14

In Situ and Ex Situ Ellipsometric Characterization of Oxygen Plasma and UV Radiation Effects on Spacecraft Materials

Bungay, C. L., Tiwald, T. E., DeVries, M. J., Dworak, B. J., Woollam, John A.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 360 KB

english, 1997

15

In Situ Plasma Characterization of Laser-Ablated BaxSr1-xTiO3

Venizelos, D. T., Sengupta, S., Sausa, R. C.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 395 KB

english, 1997

16

Growth of La2−x SrxCuO4 and La2CuO4+δ thin films by Reactive Coevaporation

Sato, H., Yamamoto, H., Naito, M.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 985 KB

english, 1997

17

Spectral-Component Monitoring of the Plumes Generated during the Deposition of RE(Y, Nd) Ba2Cu3O7−x Films by Pulsed Laser Ablation

Biggers, R., Varanasi, C., Maartense, I., Dempsey, D., Mastc, D., Liptak, D., Jones, J., Peterson, T. L., Murray, T., Busbee, J.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 322 KB

english, 1997

18

Rheed Studies of a-Axis Oriented DyBa2Cu3O7 Films Grown by All-MBE

Bozovic, Ivan, Eckstein, J. N., Bozovic, Natasha, O'Donnell, J.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 3.62 MB

english, 1997

19

Atomic-scale Analysis of Laser MBE Growth of Oxide Thin Films by in situ Rheed and Caiciss

Yoshimoto, M., Ohnishi, T., Lee, G-H., Sasaki, K., Maruta, H., Koinuma, H.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 2.55 MB

english, 1997

20

Rotating-Compensator Multichannel Ellipsometry: Applications in Process Development for Nanocrystalline Diamond Thin Films

Collins, R. W., Lee, Joungchel, Rovira, P. I., An, Ilsin

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 1.56 MB

english, 1997

21

In-Situ Diagnostics at High Pressures: Ellipsometric and Rheed Studies of the Growth of Yba2Cu3O7

Blank, Dave H. A., Rogalla, Horst

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 745 KB

english, 1997

22

Rheed Monitoring of Rotating Samples During Largearea Homogeneous Deposition of Oxides

Matijasevic, V. C., Lu, Z., Dessonneck, K. Von, Taylor, C., Barlett, D.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 2.79 MB

english, 1997

23

In Situ Initial Growth Studies of (Sr, Ca)CuO2 ON SrTiO3 by High Pressure Rheed

Koster, Gertjan, Runders, Guus J. H. M., Blank, Dave H. A., Rogalla, Horst

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 918 KB

english, 1997

24

In Situ Fhir Spectroscopic Detection of Adsorbed Species on Sapphire Substrates in a Diamond ECR-Pacvd System

Shahedipour, F., Zhu, S., White, H. W.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 839 KB

english, 1997

25

Spectroscopic Determination of C2 Densities in AR/H 2/CH 4 and AR/H2/C60 Microwave Plasmas For Nanocrystalline Diamond Synthesis

Goyette, A. N., Lawler, J. E., Anderson, L. W., Gruen, D. M., Mccauley, T. G., Zhou, D., Krauss, A. R.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 400 KB

english, 1997

26

Microanalysis of Soot Particulates using Stem

Bell, David C., Rainey, Lenore C., Palotás, ÁrpÁd B., Vandersande, John B.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 1.10 MB

english, 1997

27

Real-time Monitoring of semiconductor growth by Spectroscopic ellipsometry

Johs, B., Hale, J., Herzinger, C., Doctor, D., Elliott, K., Olson, G., Chow, D., Roth, J., Ferguson, I., Pelczynski, M., Kuo, C. H., Johnson, S.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 779 KB

english, 1997

28

Material Balance Modeling of End-Point Uniformity in Silicon Dioxide Plasma Etching

Chamberst, J. J., Min, K., Hauser, J. R., Parsonst, G. N.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 444 KB

english, 1997

29

Reflection High-Energy Electron Diffraction as an Intrinsic Material Property Sensor for Machine Condition Transfer Function in Molecular Beam Epitaxial Growth of III-V Compound Semiconductors

Chen, P., Wangt, C., Madhukar, A., Khant, T., Small, A., Yan, Z., Viswanathan, R.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 2.62 MB

english, 1997

30

In-situ RF diagnostic for PECVD process control

Raoux, S., Liu, K. S., Guo, X., Silvetti, D.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 1.43 MB

english, 1997

31

In Situ Monitoring of Anodic Oxide Growth on SI (001) by Interface Second-Harmonic Generation

Janz, S., Bardwell, J. A.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 430 KB

english, 1997

32

CVD Growth and Excimer Laser Processing of SiGe Alloys Monitored by Single Wavelength Ellipsometry and Atomic Force Microscopy

Larciprete, R., Padeletti, G., Cozzi, S., Pieretti, S.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 1.77 MB

english, 1997

33

Real-Time Feedback Control of Thermal CL2 Etching of GaAs Based on In-Situ Spectroscopic Ellipsometry

Parent, T., Heitz, R., Chen, P., Madhukar, A.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 451 KB

english, 1997

34

X-ray Diffraction Study of Laser-Material Interactions with an Ultrafast Table-Top X-ray Source

Guo, T., Rose-Petruck, C., Jimenez, R. X., Squier, J. A., Walker, B. C., Wilson, K. R., Barty, C. P. J.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 1.70 MB

english, 1997

35

Infrared Emission Spectra of Indium Phosphide at Elevated Temperatures

Rogne, H., Timans, P. J., Ahmed, H.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 350 KB

english, 1997

36

Characterization of a Solid-Source Delivery System for Metal Organic Chemical Vapor Deposition by In-Situ Laser Reflectance

Dubourdieu, C., Kim, G. Y., Meyer, J. D., Gallois, B.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 327 KB

english, 1997

37

Closed-Loop Control of MBE Using an Integrated Multi-Sensor System

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 641 KB

english, 1997

38

Real Time Observation of Material Deformation Processes by Synchrotron White Beam X-ray Topography

Zhao, Z. B., Hershberger, J., Rek, Z. U., Bilello, J. C.

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 3.02 MB

english, 1997

39

In-Situ Monitoring during PLD of Complex Oxides using Rheed at High Oxygen Pressure

Rijnders, Guus J. H. M., Koster, Gertian, Blank, Dave H. A., Rogalla, Horst

Journal:

MRS Proceedings

Année:

1997

Langue:

english

Fichier:

PDF, 2.04 MB

english, 1997