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Volume 1427

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MRS Proceedings
Volume 1427

MRS Proceedings

Volume 1427

1

Intermetallic Formation in PZT for MEMS Structures

Sharma, Kanu priya, Oseroff, Thomas, Lunardi, Leda

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 667 KB

english, 2012

2

Heterogeneous Integration of LSI Amplifier and the Tactile Sensor Using Stacking and Through-Si-Via Techniques

Sohgawa, Masayuki, Yokoyama, Hokuto, Kanashima, Takeshi, Okuyama, Masanori, Noma, Haruo

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 1.72 MB

english, 2012

3

Laminate MEMS for Heterogeneous Integrated Systems

Li, G. P., Bachman, Mark

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 634 KB

english, 2012

4

The Integration of the Ferromagnetic Inductors into the Standard CMOS Chip

Nizhnik, Oleg, Vinluan, Olinver M., Higuchi, Kohei, Sonoda, Koji, Ishii, Masatoshi, Maenaka, Kazusuke

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 678 KB

english, 2012

5

Improving Photoresist Spray Coating on 3D Structures for Microfluidic Devices

Kumagai, Shinya, Fukuda, Naoya, Tajima, Hisayoshi, Sasaki, Minoru

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 2.29 MB

english, 2012

6

A 3‐dB Quadrature WLP Coupler for 60 GHz Applications

Kiumarsi, Hamid, Ito, Hiroyuki, Ishihara, Noboru, Okada, Kenichi, Uemichi, Yusuke, Chiba, Yasuto, Masu, Kazuya

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 461 KB

english, 2012

7

Combinatorial New Facing Targets Sputtering

Maetani, Takuya, Mori, Naoya, Nakamitsu, Yutaka, Hata, Seiichi

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 355 KB

english, 2012

8

Diamond-Like Carbon Thin Films with Extremely High Compressive Stress (>8~12GPa) for Advanced CMOS Strain Engineering

Ma, Xiaolong, Yin, Huaxiang, Fu, Zuozhen, Zhang, Haiqiang, Zhang, Xu, Yan, Jiang, Zhao, Chao, Chen, Dapeng, Ye, Tianchun

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 654 KB

english, 2012

9

A Low-Voltage and High Uniformity NEMS Tunable Color Filter Based on Subwavelength Grating

Honma, Hiroaki, Takahashi, Kazuhiro, Ishida, Makoto, Sawada, Kazuaki

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 1.01 MB

english, 2012

10

Controlling Crystallization Structures in Thin Si Film for Improving Characteristics of MEMS Resonators

Kumagai, Shinya, Murase, Hiromu, Tomikawa, Takashi, Ogawa, Syohei, Yamashita, Ichiro, Uraoka, Yukiharu, Sasaki, Minoru

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 10.10 MB

english, 2012

11

3D Heterogeneous Integration using MEMS Devices for RF Applications

Nakazawa, Fumihiko, Mi, Xiaoyu, Shimanouchi, Takeaki, Nakatani, Tadashi, Katsuki, Takashi, Inoue, Hiroaki, Toyoda, Osamu, Ueda, Satoshi

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 1.05 MB

english, 2012

12

MEMS on LSI by Adhesive Bonding and Wafer Level Packaging

Esashi, Masayoshi, Tanaka, Shuji

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 2.70 MB

english, 2012

13

Collagen as a Humidity Sensing Dielectric Material

Hudspeth, Mathew A., Kaya, Tolga

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 839 KB

english, 2012

14

An Optimized ICP Etching Process for Pyramidal C-QWIP FPAs

Sun, Jason, Choi, Kwong-kit, Lee, Unchul

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 1.25 MB

english, 2012

15

MEMS-CMOS Integrated Tactile Sensor with Digital Signal Processing for Robot Application

Makihata, M., Muroyama, M., Tanaka, S., Yamada, H., Nakayama, T., Yamaguchi, U., Mima, K., Nonomura, Y., Fujiyoshi, M., Esashi, M.

Journal:

MRS Proceedings

Année:

2012

Langue:

english

Fichier:

PDF, 211.84 MB

english, 2012