Volume 88; Issue 9

Microelectronic Engineering

Volume 88; Issue 9

1

Impact of adhesive rheology on stress-distortion of bonded plastic substrates for flexible electronics applications

Jesmin Haq, Bryan D. Vogt, Gregory B. Raupp, Doug Loy

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 665 KB

english, 2011

2

Pattern evolution in shallow trench isolation chemical mechanical planarization via real-time shear and down forces spectral analyses

Yasa Sampurno, Fransisca Sudargho, Yun Zhuang, Toranosuke Ashizawa, Hiroyuki Morishima, Ara Philipossian

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 918 KB

english, 2011

3

A lubrication model between the soft porous brush and rigid flat substrate for post-CMP cleaning

Yating Huang, Dan Guo, Xinchun Lu, Jianbin Luo

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.89 MB

english, 2011

4

Dry etching fin process for SOI finFET manufacturing: Transition from 32 to 22 nm node on a 6T-SRAM cell

E. Altamirano-Sánchez, V. Paraschiv, M. Demand, W. Boullart

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 2.16 MB

english, 2011

5

Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors

F.A. Hassani, C. Cobianu, S. Armini, V. Petrescu, P. Merken, D. Tsamados, A.M. Ionescu, Y. Tsuchiya, H. Mizuta

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 541 KB

english, 2011

6

Creation of convex microlenses in PDMS with focused MeV ion beam

S.Z. Szilasi, N. Hegman, A. Csik, I. Rajta

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 526 KB

english, 2011

7

Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection

Xi Chen, Zhong-Chao Fan, Yun Xu, Guo-Feng Song, Liang-Hui Chen

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.53 MB

english, 2011

8

Characterization and performance of Schottky diode based on wide band gap semiconductor ZnO using a low-cost and simplified sol–gel spin coating technique

A.A.M. Farag, W.A. Farooq, F. Yakuphanoglu

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 895 KB

english, 2011

9

Fabrication of nickel stamp with improved sidewall roughness for optical devices

Seung Hun Oh, Sang Uk Cho, Chang Seok Kim, Young Geun Han, Cheon-Soo Cho, Myung Yung Jeong

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.46 MB

english, 2011

10

Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser

Tsung-Fu Yao, Ping-Han Wu, Tzong-Ming Wu, Chung-Wei Cheng, Sen-Yeu Yang

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.04 MB

english, 2011

11

Control over pattern fidelity and surface wettability of imprinted templates for flexible color filter manufacturing

Aleksander Bessonov, Jung-Woo Seo, Jeong-Gil Kim, Eun-Soo Hwang, Jong-Woo Lee, Jong-Woo Cho, Dae-Jung Kim, Sukwon Lee

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 829 KB

english, 2011

12

Thermally enhanced single-walled carbon nanotube microfluidic alignment

Zhijiang Ye, Dongjin Lee, Stephen A. Campbell, Tianhong Cui

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.04 MB

english, 2011

13

A review of recent results on diamond vacuum lateral field emission device operation in radiation environments

K. Subramanian, W.P. Kang, J.L. Davidson, N. Ghosh, K.F. Galloway

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 848 KB

english, 2011

14

Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting

Ki-Young Ko, Eun-Jin Her, William T. Nichols, Heon Lee, Young Rag Do, Jinho Ahn

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 654 KB

english, 2011

15

Local doping of silicon by a point-contact microwave applicator

P. Livshits, V. Dikhtyar, A. Inberg, A. Shahadi, E. Jerby

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 531 KB

english, 2011

16

Preparation and characterization of Fe3+-doped Ni0.9Co0.8Mn1.3−xFexO4 (0 ≤ x ≤ 0.7) negative temperature coefficient ceramic materials

Huimin Zhang, Aimin Chang, Changwen Peng

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 919 KB

english, 2011

17

Contactless read-out of printed memory

Mark Allen, Mikko Aronniemi, Tomi Mattila, Panu Helistö, Hannu Sipola, Anssi Rautiainen, Jaakko Leppäniemi, Ari Alastalo, Raimo Korhonen, Heikki Seppä

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 852 KB

english, 2011

18

Non-volatile memory with zinc oxide nanoparticles embedded in a hybrid polymethylsilsesquioxane layer

W.K. Lee, H.Y. Wong, K.C. Aw

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 332 KB

english, 2011

19

Single-material-based multilayered nanostructures fabrication via reverse thermal nanoimprinting

S.Y. Yew, T.S. Kustandi, H.Y. Low, J.H. Teng, Y.J. Liu, Eunice S.P. Leong

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 644 KB

english, 2011

20

Interface control and photovoltaic properties of n-type silicon/metal junction by organic dye

F. Yakuphanoglu, Y.S. Ocak, T. Kılıçoğlu, W.A. Farooq

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 521 KB

english, 2011

21

High mobility strained Si0.5Ge0.5/SSOI short channel field effect transistors with TiN/GdScO3 gate stack

R.A. Minamisawa, M. Schmidt, E. Durgun Özben, J.M.J. Lopes, J.M. Hartmann, K.K. Bourdelle, J. Schubert, Q.T. Zhao, D. Buca, S. Mantl

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 863 KB

english, 2011

22

Pentacene/n−-Si heterojunction diodes and photovoltaic devices investigated by I–V and C–V measurements

N. Oyama, Y. Takanashi, S. Kaneko, K. Momiyama, K. Suzuki, F. Hirose

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 380 KB

english, 2011

23

Study of interfacial reactions between Sn3.5Ag0.5Cu composite alloys and Cu substrate

L.C. Tsao, C.P. Chu, S.F. Peng

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.50 MB

english, 2011

24

Environmental protection of inkjet-printed Ag conductors

Eerik Halonen, Vesa Pynttäri, Juha Lilja, Hannu Sillanpää, Matti Mäntysalo, Jouko Heikkinen, Riku Mäkinen, Tero Kaija, Pekka Salonen

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 728 KB

english, 2011

25

Instabilities in Focused Ion Beam-patterned Au nanowires

J.P. Naik, P.D. Prewett, K. Das, A.K. Raychaudhuri

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 567 KB

english, 2011

26

Permittivity of modified polyimide layers on LTCC

Achim Bittner, Helmut Seidel, Ulrich Schmid

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 646 KB

english, 2011

27

Effects of abrasive particle size and tool surface irregularities on wear rates of work and tool in polishing processes

Tu-Chieh Hung, Shao-Heng Chang, Cheng-Chi Lin, Yaw-Terng Su

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 942 KB

english, 2011

28

Anomalous thermal oxidation of gadolinium thin films deposited on silicon by high pressure sputtering

M.A. Pampillón, P.C. Feijoo, E. San Andrés, M.L. Lucía, A. del Prado, M. Toledano-Luque

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 610 KB

english, 2011

29

Effects of temperature on series resistance determination of electrodeposited Cr/n-Si/Au–Sb Schottky structures

Ö. Demircioglu, Ş. Karataş, N. Yıldırım, Ö.F. Bakkaloglu

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 488 KB

english, 2011

30

One port contour-mode ZnO piezoelectric MEMS resonator

Tadeusz Gryba, Julien Carlier, Shengxiang Wang, XingZhong Zhao, Shishang Guo, Jean-Etienne Lefebvre

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 910 KB

english, 2011

31

Nanoimprint lithography resist profile inversion for lift-off applications

Philip A. Shields, Duncan W.E. Allsopp

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 827 KB

english, 2011

32

Development of flexible piezoelectric nanogenerator: Toward all wet chemical method

Yao-Yi Cheng, Shang-Chih Chou, Jun-An Chang

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 798 KB

english, 2011

33

Effect of mechanical process parameters on friction behavior and material removal during sapphire chemical mechanical polishing

Zefang Zhang, Weixia Yan, Lei Zhang, Weili Liu, Zhitang Song

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 399 KB

english, 2011

34

Golden bump for 20 micron diameter wire bond enhancement at reduced process temperature

Chunyan Nan, Michael Mayer, Norman Zhou, John Persic

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 929 KB

english, 2011

35

Study of metal barrier deposition-induced damage to porous low-k materials

Larry Zhao, Henny Volders, Mikhail Baklanov, Zsolt Tőkei, Marianna Pantouvaki, Christopher J. Wilson, Els Van Besien, Gerald P. Beyer, Cor Claeys

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 368 KB

english, 2011

36

Gas sensing of colloidal polyaniline in a chemoresistor consisting of nanometer electrodes

S.Y. Park, M.S. Bae, I.D. Jeon, J.J. Lee

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.12 MB

english, 2011

37

Fabrication of high aspect ratio nanostructures on 3D surfaces

T. Senn, J.P. Esquivel, N. Sabaté, B. Löchel

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.15 MB

english, 2011

38

Organized porous alumina membranes for high density silicon nanowires growth

T. Bernardin, L. Dupré, L. Burnier, P. Gentile, D. Peyrade, M. Zelsmann, D. Buttard

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 678 KB

english, 2011

39

Microstructure characterization of SnAgCu solder bearing Ce for electronic packaging

Liang Zhang, Song-bai Xue, Li-li Gao, Wei Dai, Feng Ji, Yan Chen, Sheng-lin Yu

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 622 KB

english, 2011

40

Inside Front Cover - Editorial Board

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 25 KB

english, 2011