
Self-Organization and Dynamics of Nanoparticles in Chemically Active Plasmas for Low-Temperature Deposition of Silicon and Carbon-Based Nanostructured Films
S. V. Vladimirov, K. OstrikovVolume:
35
Année:
2004
Pages:
1
DOI:
10.1002/chin.200407324
Fichier:
PDF, 58 KB
2004