Planar optical waveguide thin films grown by microwave ECR PECVD
Jinsong Zhang, Zhaoxing Ren, Rongqing Liang, Yifeng Sui, Wei LiuVolume:
131
Année:
2000
Langue:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00748-9
Fichier:
PDF, 1.67 MB
english, 2000