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Electrical characterization of low permittivity materials for ULSI inter-metal-insulation
J Cluzel, F Mondon, Y Loquet, Y Morand, G ReimboldVolume:
40
Année:
2000
Langue:
english
Pages:
4
DOI:
10.1016/s0026-2714(99)00319-4
Fichier:
PDF, 256 KB
english, 2000