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Studies of 4H-SiC wafer and its epitaxial layers grown by chemical vapor deposition
Kodigala Subba Ramaiah, I. Bhat, T.P. Chow, J.K. Kim, E.F. Schubert, D. JohnstoneVolume:
391
Année:
2007
Langue:
english
Pages:
7
DOI:
10.1016/j.physb.2006.08.051
Fichier:
PDF, 1.40 MB
english, 2007