Electrical and mechanical properties of layered gold–chromium thin films for ohmic contacts in RF-MEMS switches
V. Mulloni, R. Bartali, S. Colpo, F. Giacomozzi, N. Laidani, B. MargesinVolume:
163
Année:
2009
Langue:
english
Pages:
5
DOI:
10.1016/j.mseb.2009.06.004
Fichier:
PDF, 709 KB
english, 2009