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Study of stress-induced leakage current (SILC) in HfO2/Dy2O3 high-κ gate stacks on germanium
M.S. Rahman, E.K. Evangelou, I.I. Androulidakis, A. DimoulasVolume:
49
Année:
2009
Langue:
english
Pages:
6
DOI:
10.1016/j.microrel.2008.10.005
Fichier:
PDF, 450 KB
english, 2009