Study of fabrication process of a micro electrostatic switch and its application to a micromechanical V—F converter
Xi-Qing Sun, Zhijian Li, Xinyu Zheng, Litian LiuVolume:
35
Année:
1993
Langue:
english
Pages:
4
DOI:
10.1016/0924-4247(93)80150-f
Fichier:
PDF, 724 KB
english, 1993