Computer simulation of boron nitride deposition by ion-beam-assisted evaporation
W. Mo¨ller, D. Bouchier, O. Burat, V. StambouliVolume:
45
Année:
1991
Langue:
english
Pages:
9
DOI:
10.1016/0257-8972(91)90208-e
Fichier:
PDF, 449 KB
english, 1991