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Submicron patterns formed by reactive ion etching
W. Pilz, T. Sponholz, S. Pongratz, H. MaderVolume:
3
Année:
1985
Langue:
english
Pages:
7
DOI:
10.1016/0167-9317(85)90058-9
Fichier:
PDF, 788 KB
english, 1985