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[IEEE 2020 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2020.6.16-2020.6.19)] 2020 IEEE Symposium on VLSI Technology - First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers
Subramanian, S., Hosseini, M., Chiarella, T., Sarkar, S., Schuddinck, P., Chan, B.T., Radisic, D., Mannaert, G., Hikavyy, A., Rosseel, E., Sebaai, F., Peter, A., Hopf, T., Morin, P., Wang, S., DevrienAnnée:
2020
DOI:
10.1109/VLSITechnology18217.2020.9265073
Fichier:
PDF, 1.12 MB
2020