Investigation of vibration-assisted nano-grinding of gallium nitride via molecular dynamics
Huang, Yuhua, Wang, Miaocao, Xu, Yixin, Zhu, FulongVolume:
121
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105372
Date:
January, 2021
Fichier:
PDF, 9.98 MB
2021