Temperature Excursions Due to the Reaction Heat Produced by Atomic Layer Deposition on Nanostructured Substrates
Greenberg, Benjamin L., Anderson, Kevin P., Wolak, Mason A., Jacobs, Alan G., Wollmershauser, James A., Feigelson, Boris N.Journal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.0c03644
Date:
November, 2020
Fichier:
PDF, 2.64 MB
2020
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