Atomic Layer Deposition of Palladium Coated TiO2/Si nanopillars: ToF-SIMS, AES and XPS characterization study
Iatsunkyi, Igor, Gottardi, Gloria, Micheli, Victor, Canteri, Roberto, Coy, Emerson, Bechelany, MikhaelJournal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.148603
Date:
November, 2020
Fichier:
PDF, 4.69 MB
2020