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[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Method for improving stability of plasma ignition in a multi-cathode magnetron PVD system
Gruss-Gifford, Jessica, Mehta, Virat, Straten, Oscar van der, Rodriguez, Gabriel, Lippitt, Maxwell, Canaperi, DonaldAnnée:
2020
DOI:
10.1109/asmc49169.2020.9185236
Fichier:
PDF, 353 KB
2020