Influence of 2.09-μm pulse duration on through-silicon laser ablation of thin metal coatings
Astrauskas, I., Považay, B., Baltuška, A., Pugžlys, A.Volume:
133
Journal:
Optics & Laser Technology
DOI:
10.1016/j.optlastec.2020.106535
Date:
January, 2021
Fichier:
PDF, 9.46 MB
2021