IR laser-induced decomposition of disiloxane for chemical vapour deposition of poly(hydridosiloxane) films
Josef Pola, Markéta Urbanová, Vladislav Dřínek, Jan Šubrt, Helmut BeckersVolume:
13
Année:
1999
Langue:
english
Pages:
4
DOI:
10.1002/(sici)1099-0739(199909)13:93.0.co;2-0
Fichier:
PDF, 143 KB
english, 1999