Vibration reduction control of a voice coil motor (VCM) nano scanner
Jong-kyu Jung, Woo-seub Youm, Kyi-hwan ParkVolume:
10
Langue:
english
Pages:
4
DOI:
10.1007/s12541-009-0063-7
Date:
July, 2009
Fichier:
PDF, 298 KB
english, 2009