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[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Improved Duplicate Photomask Matching using AIMS⢠Metrology for 14nm and smaller
Fakhoury, Jean R., Lawliss, Mark, Faure, Tom, Zweber, Amy, Ying, Yurong, Magg, Christopher, Morgenfeld, BradleyAnnée:
2020
DOI:
10.1109/asmc49169.2020.9185288
Fichier:
PDF, 238 KB
2020