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Tribology issues in nanoimprint lithography
Kwang-Seop Kim, Jae-Hyun Kim, Hak-Joo Lee, Sang-Rok LeeVolume:
24
Langue:
english
Pages:
8
DOI:
10.1007/s12206-009-1216-4
Date:
January, 2010
Fichier:
PDF, 2.19 MB
english, 2010