[IEEE 2020 32nd International Symposium on Power Semiconductor Devices and ICs (ISPSD) - Vienna, Austria (2020.9.13-2020.9.18)] 2020 32nd International Symposium on Power Semiconductor Devices and ICs (ISPSD) - Dislocation Propagation in Si 300 mm Wafer during High Thermal Budget Process and Its Optimization
Sato, Ryohei, Kakimoto, Koichi, Saito, Wataru, Nishizawa, Shin-ichiAnnée:
2020
DOI:
10.1109/ISPSD46842.2020.9170035
Fichier:
PDF, 2.08 MB
2020