3D finite element analysis of corrugated silicon carbide membrane for ultrasonic MEMS microphone applications
Auliya, Rahmat Zaki, Ooi, Poh Choon, Mohd. Razip Wee, M. F., Mohammad Haniff, Muhammad Aniq Shazni, Zawawi, Siti Aisyah, Hamzah, Azrul AzlanJournal:
Microsystem Technologies
DOI:
10.1007/s00542-020-05006-1
Date:
August, 2020
Fichier:
PDF, 1.50 MB
2020
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