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[IEEE 2020 IEEE Symposium on VLSI Circuits - Honolulu, HI, USA (2020.6.16-2020.6.19)] 2020 IEEE Symposium on VLSI Circuits - A 200μW Eddy Current Displacement Sensor with 6.7nm RMS Resolution
Pimenta, Matheus, Gurleyuk, Cagri, Walsh, Paul, O'Keeffe, Daniel, Babaie, Masoud, Makinwa, KofiAnnée:
2020
DOI:
10.1109/VLSICircuits18222.2020.9162849
Fichier:
PDF, 438 KB
2020