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[IEEE 2020 IEEE 70th Electronic Components and Technology Conference (ECTC) - Orlando, FL, USA (2020.6.3-2020.6.30)] 2020 IEEE 70th Electronic Components and Technology Conference (ECTC) - Extreme Wafer Thinning and nano-TSV processing for 3D Heterogeneous Integration
Jourdain, Anne, Schleicher, Filip, De Vos, Joeri, Stucchi, Michele, Chery, Emmanuel, Miller, Andy, Beyer, Gerald, Van der Plas, Geert, Walsby, Edward, Roberts, Kerry, Ashraf, Huma, Thomas, Dave, BeyneAnnée:
2020
DOI:
10.1109/ECTC32862.2020.00020
Fichier:
PDF, 973 KB
2020