Investigation of nitridation time on the quality of AlGaN/GaN heterojunction grown on AlN-sputtered sapphire substrate
Ma, Depu, Xu, Shengrui, Tao, Hongchang, Li, Wen, Peng, Ruoshi, Du, Jinjuan, Fan, Xiaomeng, Zhao, Ying, Zhang, Jincheng, Hao, YueVolume:
277
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2020.128395
Date:
October, 2020
Fichier:
PDF, 1.69 MB
2020